How to Improve Energy Efficiency and Reduce CO2 Emissions with Next-Generation N2 Purge Systems

Semiconductor manufacturers are facing immense pressure today to curb energy consumption and CO2 emissions. Yet, achieving these objectives poses significant challenges. However, the good news is there’s a critical area within the fab offering a straightforward pathway to substantial energy savings and that’s nitrogen (N2) purge systems.

This white paper delves into this solution and achieving benefits like:

· Low cost of ownership

· Reliability, simplicity, and precision without hysteresis

· Minimal energy consumption

· Compact construction

· Minimal risk of leakages

· Long service life, etc.

Furthermore, it underscores the crucial role of innovative piezo valve technology in enhancing precision and mitigating risks.